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nanogap sensor embedded in nanochannel device

Based on

1 Articles
2013 Most recent source

Composition

1

amorphous silicon dioxide

amorphous silicic oxide amorphous silica
Type Single Compound
Formula SiO2
Role substrate
2

titanium

Type Single Compound
Formula Ti
Role adhesion layer
3

platinum

Type Single Compound
Formula Pt
Role electrodes
4

silicon nitride/silicon oxide/silicon nitride stack

Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source

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Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • amorphous silicon dioxide
Product

nanogap sensor embedded in nanochannel device

References

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