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nanoparticles embedded metal-oxide-semiconductor capacitor

Based on

1 Articles
2013 Most recent source

Composition

1

aluminium

aluminum
Type Single Compound
Formula Al
Role films
2

p-doped silicon

p-type silicon p-type Si silicon
Type Single Compound
Formula Si
Role substrate
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role tunneling oxide layer
4

photoresist

Type Complex Compound
Formula
Role photoresist layer
5

gold nanoparticles

Au nanoparticles gold NP Au NP AuNP GNP
Type
Formula
Role
6

photoresist

Type Complex Compound
Formula
Role patterned photoresist
7

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role control oxide layer

Properties

General physical and chemical properties

Property Value Source
capacitance

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Applications

Area Application Source
energy storage

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Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. FRy9S5o2raWuXKus
Product

nanoparticles embedded metal-oxide-semiconductor capacitor

Method 2

Type: Chemical synthesis
Source:
  1. qYnTVd4fQafAp5LT
Product

nanoparticles embedded metal-oxide-semiconductor capacitor

References

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