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Al/AlOx /TaOx/W memory device

Based on

1 Articles
2014 Most recent source

Composition

1

tungsten

Type Single Compound
Formula W
Role electrodes
2

oxygen deficient tantalum oxide

tantalum suboxide tantalum oxide TaO2-x TaOx TaOy TaOx
Type
Formula TaO(x)
Role
3

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
4

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes
5

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes
6

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
7

silicon

Type
Formula Si
Role
8

substoichiometric aluminum oxide

noncrystalline aluminum oxide anodized aluminum oxide oxidized aluminium aluminium suboxide aluminium oxide aluminum oxide alumina
Type
Formula AlO(x)
Role

Properties

Applications

Area Application Source
data storage

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Characterization

Method Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

References

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