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RuOx nanocrystal memory capacitor

Based on

1 Articles
2011 Most recent source

Composition

1

n-type Si

Type Complex Compound
Formula
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role tunneling oxide layer
3

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia a-HfO2 HfO2
Type Single Compound
Formula HfO2
Role tunneling oxide layer
4

RuOx nanocrystals

Type
Formula
Role
5

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role charge-trapping layer
6

platinum

Type Single Compound
Formula Pt
Role gate

Properties

General physical and chemical properties

Property Value Source
breakdown voltage

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Applications

Area Application Source
data storage

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
  1. PfV5q2PrVBM
Product

RuOx nanocrystal memory capacitor

Method 2

Type: Physical formation
Source:
  1. 9uViXBljETS
Product

RuOx nanocrystal memory capacitor

References

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