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piezoelectric membrane actuator

Based on

1 Articles
2011 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

silicon

Type Single Compound
Formula Si
Role membranes
4

yttria-stabilized zirconia

YSZ
Type Complex Compound
Formula
Role buffer layer
5

SRO

Type Single Compound
Formula SrRuO3
Role electrodes
6

lead zirconium titanate

lead zirconium titanate PZT
Type Complex Compound
Formula
Role piezoelectric layer
7

SRO

Type Single Compound
Formula SrRuO3
Role electrodes

Properties

General physical and chemical properties

Property Value Source
dielectric constant

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Applications

Area Application Source
electronics

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Characterization

Method Source
optical microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon-on-insulator
Product

piezoelectric membrane actuator

References

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