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silicon nanowire field-effect transistor based sensor

Based on

1 Articles
2011 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role gate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

DNA receptor-modified silicon nanowire

DNA receptor-modified Si NW
Type
Formula
Role
4

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
5

nickel

Type Single Compound
Formula Ni
Role adhesion layer
6

platinum

Type Single Compound
Formula Pt
Role source
7

platinum

Type Single Compound
Formula Pt
Role drain
8

polyimide

Type Polymer
Formula
Role surface protecting layer

Properties

Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
  1. FEhG9MHHC7aXkNUt4qXllxYHmZLI
Product

silicon nanowire field-effect transistor based sensor

References

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