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thin film transistor

Based on

1 Articles
2013 Most recent source

Composition

1

Si/SiO2

Type Complex Compound
Formula
Role substrate
2

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula TaN
Role bottom gate
3

erbium titanate

Type Single Compound
Formula Er2TiO5
Role gate dielectrics
4

amorphous indium gallium zinc oxide

a-IGZO
Type Complex Compound
Formula
Role channels
5

aluminium

aluminum
Type Single Compound
Formula Al
Role source/drain

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
Product

thin film transistor

References

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