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AlSb3Te-based buffer layer-free phase change memory cell

Based on

1 Articles
2013 Most recent source

Composition

1

substrate

Type Complex Compound
Formula
Role substrate
2

Ti/TiN/Al layer

Type
Formula
Role
3

tungsten

Type Single Compound
Formula W
Role electrodes
4

tungsten

Type Single Compound
Formula W
Role plug
5

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
6

AlSb3Te

Type Single Compound
Formula AlSb3Te
Role phase-change layer
7

titanium nitride

Type Single Compound
Formula TiN
Role top electrode
8

aluminium

aluminum
Type Single Compound
Formula Al
Role top electrode

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

References

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