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IZO-based TFT with Si gate dielectric

Based on

1 Articles
2013 Most recent source

Composition

1

soda-lime-silica glass

soda-lime glass glass
Type Complex Compound
Formula
Role substrate
2

tin-doped indium oxide

indium tin oxide ITO
Type Complex Compound
Formula
Role gate
3

amorphous silicon

amorphous Si a-Si:H a-Si aSi
Type Single Compound
Formula Si
Role gate dielectrics
4

IZO thin film

Type Nano Material
Formula
Role channel layer
5

amorphous indium zinc oxide

a-IZO
Type Complex Compound
Formula
Role source
6

amorphous indium zinc oxide

a-IZO
Type Complex Compound
Formula
Role drain

Properties

General physical and chemical properties

Property Value Source
field-effect mobility

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • soda-lime-silica glass
  • tin-doped indium oxide
Product

IZO-based TFT with Si gate dielectric

References

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