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metal-oxide-semiconductor capacitor

Based on

1 Articles
2011 Most recent source

Composition

1

n-type Si

Type
Formula
Role
2

La-doped zirconia film

La-doped ZrO2 film
Type
Formula
Role
3

gold

Type
Formula Au
Role
4

200 nm thick aluminium layer

aluminium layer aluminium film Al layer Al film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source
breakdown voltage

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • n-type Si
  • (MeCp)2ZrMe(OMe)
  • oxygen
See all (4)
  1. c5jn5f3aETnXWZ1mVpoWgQqufyoi5dk6
  2. 5HzJ4
Product

metal-oxide-semiconductor capacitor

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • n-type Si
  • oxygen
  • (iPrCp)3La
See all (4)
  1. JPS8lnpTD5w564Qz4p3wk0PLxURwVaBU
  2. ndxYu
Product

metal-oxide-semiconductor capacitor

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • n-type Si
  • oxygen
  • (MeCp)2ZrMe(OMe)
See all (4)
  1. qytOhcmBhrBBCBz395lbcyB5cpCzGaa9
  2. ck1Xx
Product

metal-oxide-semiconductor capacitor

References

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