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In2O3-based MEMS device

Based on

1 Articles
2014 Most recent source

Composition

1

n-type silicon

Type Complex Compound
Formula
Role substrate
2

silicon-rich nitride

silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role insulating layer
3

platinum

Type Single Compound
Formula Pt
Role heaters
4

platinum

Type Single Compound
Formula Pt
Role sensing electrode
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role passivation layer
6

indium sesquioxide

indium(III) oxide indium trioxide indium oxide
Type Single Compound
Formula In2O3
Role active layer

Properties

Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
compounds sensor for NO(x) gases

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Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
optical microscopy

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Biological effects

Preparation

References

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