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In2O3-based MEMS device

Based on

1 Articles
2014 Most recent source

Composition

1

n-type silicon

Type Complex Compound
Formula
Role substrate
2

silicon-rich nitride

silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role insulating layer
3

platinum

Type Single Compound
Formula Pt
Role heaters
4

platinum

Type Single Compound
Formula Pt
Role sensing electrode
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role passivation layer
6

indium sesquioxide

indium(III) oxide indium trioxide indium oxide
Type Single Compound
Formula In2O3
Role active layer

Properties

Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

References

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