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gas sensor with a conductive sensing element on a microhotplate

Based on

1 Patents
2014 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

buffer layer material

insulating layer mask layer
Type Variant
Formula
Role dielectric layer
3

microhotplate

Type Variant
Formula
Role conducting layer
4

metal catalyst

Type
Formula
Role
5

nanowires functionalized with metal oxide

Type
Formula
Role

Properties

Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

References

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