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Al/Si3N4/SRSN/SiO2/Si memory capacitor

Based on

1 Articles
2011 Most recent source

Composition

1

p-Si

Type
Formula
Role
2

10-nm-thick SiO2 layer

silica thin film silica nanofilm SiO2 thin film SiO2 nanofilm silica layer SiO2 layer SiO2 film
Type
Formula
Role
3

silicon nitride layer

silicon nitride film Si3N4 film
Type
Formula
Role
4

silicon nitride

Type
Formula Si3N4
Role
5

aluminium

aluminum
Type
Formula Al
Role

Properties

General physical and chemical properties

Property Value Source
capacitance dependent on hysteresis

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Applications

Area Application Source
data storage

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-Si
  • oxygen
Product

Al/Si3N4/SRSN/SiO2/Si memory capacitor

References

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