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TiN resistors on poly-SiC substrate

Based on

1 Articles
2014 Most recent source

Composition

1

6H-SiC(0001) wafer

silicon carbide 6H-SiC(000-1) 6H-SiC(0001) 6H-SiC wafer carborundum 6H-SiC
Type Single Compound
Formula SiC
Role substrate
2

titanium nitride layers

TiN layers
Type
Formula
Role
3

aluminium

aluminum
Type Single Compound
Formula Al
Role contacts

Properties

General physical and chemical properties

Property Value Source
specific thermal resistance

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon carbide
  • titanium nitride
Product

TiN resistors on poly-SiC substrate

Method 2

Type: Physical formation
Source:
Starting materials
  • titanium nitride
  • 6H-SiC(0001) wafer
Product

TiN resistors on poly-SiC substrate

References

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