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nanowire-based FET-type sensor

Based on

1 Articles
2014 Most recent source

Composition

1

doped silicon

Type Complex Compound
Formula
Role gate electrode
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

SiO2-coated silicon nanowires

SiO2-coated Si nanowires
Type Nano Material
Formula
Role sensing nanowire
4

nickel disilicide

nickel silicide
Type Single Compound
Formula NiSi2
Role source
5

nickel disilicide

nickel silicide
Type Single Compound
Formula NiSi2
Role drain
6

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role passivation layer

Properties

General physical and chemical properties

Property Value Source
drain current

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Sensor properties

Type of sensor Sensor property Source
compounds sensor for ions in liquid medium

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

nanowire-based FET-type sensor

References

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