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comb-shaped polyimide layer/top electrode-based capacitive humidity sensor

Based on

1 Articles
2010 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

200 nm-thick gold layer

200 nm-thick gold layer Au thin film gold layer gold film gold
Type
Formula
Role
4

flat polyimide thin film

flat PI thin film polyimide layer
Type
Formula
Role
5

comb-shaped polyimide thin film

comb-shaped PI thin film
Type
Formula
Role
6

comb-shaped gold thin film

Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source
capacitance

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
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  2. OVnP9DLQcfAz
  3. YgrrCaqP5fw1vzTDkl7adq9jVdQsFuQZFwnmTQHWWYMcqpf
Product

comb-shaped polyimide layer/top electrode-based capacitive humidity sensor

References

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