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metal-oxide-semiconductor capacitor with CeO2 dielectric layer

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

SiO2/Si substrate

Type Complex Compound
Formula
Role substrate
2

cerium(IV) oxide

ceria
Type Complex Compound
Formula
Role gate dielectrics
3

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes

Properties

General physical and chemical properties

Property Value Source
capacitance dependent on frequency

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Applications

Area Application Source
energy storage

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • cerium(III) chloride heptahydrate
  1. ScbcVCnwrXjL05uQzR
  2. mq7wHGxguLg
Product

metal-oxide-semiconductor capacitor with CeO2 dielectric layer

References

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