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field effect transistor

Based on

1 Patents
2013 Most recent source

Composition

1

substrate semiconductor material

Type Variant
Formula
Role substrate
2

dielectric

Type Complex Compound
Formula
Role interface layer
3

silicon rich oxide material

Type
Formula
Role
4

high-k dielectric

Type Variant
Formula
Role gate dielectrics
5

oxide material

Type Complex Compound
Formula
Role isolation

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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