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gate structure

Based on

1 Patents
2013 Most recent source

Composition

1

semiconductor

Type Variant
Formula
Role substrate
2

doped semiconductor

Type Variant
Formula
Role active region
3

dielectric

Type Variant
Formula
Role insulation
4

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role interface layer
5

dielectric

Type Variant
Formula
Role gate dielectrics
6

gate material

Type Variant
Formula
Role gate
7

nitrogen-containing dielectric

Type Variant
Formula
Role spacer

Properties

Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

References

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