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semiconductor device having a carbon nanotube interconnect and a carbon layer between the carbon nanotube interconnect and its adjacent metal layer

Based on

1 Patents
2013 Most recent source

Composition

1

substrate material

Type Variant
Formula
Role substrate
2

glass-like carbon

vitreous carbon glassy carbon carbon GC
Type Single Compound
Formula C
Role carbon layer
3

metal line

Type Variant
Formula
Role metal line
4

carbon nanotubes

carbon nanotube CNT
Type Nano Material
Formula
Role interconnecting layer

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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