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SiOx memory device

Based on

1 Articles
2014 Most recent source

Composition

1

SiO2/Si substrate

Type Complex Compound
Formula
Role substrate
2

platinum

Type Single Compound
Formula Pt
Role bottom electrode
3

silicon-rich silicon oxide

silicon-rich silicon oxide amorphous silicon oxide silicon-rich oxide silicon suboxide amorphous SiOx silicon oxide a-SiOx glass SRSO SiOx SRO
Type Single Compound
Formula SiO(x)
Role dielectric layer
4

palladium

Type Single Compound
Formula Pd
Role top electrode

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • SiO2/Si substrate
  • platinum
Product

SiOx memory device

Method 2

Type: Physical formation
Source:
Starting materials
  • SiO2/Si substrate
  • platinum
Product

SiOx memory device

References

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