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Nb-based extreme ultraviolet transmission mask

Based on

1 Articles
2012 Most recent source

Composition

1

silicon nitride film

Type
Formula
Role
2

silicon

Type
Formula Si
Role
3

niobium film

Type
Formula
Role
4

nickel

Type
Formula Ni
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • silicon nitride
Product

Nb-based extreme ultraviolet transmission mask

References

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