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poly-silicon wire ion sensor

Based on

1 Articles
2012 Most recent source

Composition

1

P-type silicon

Type
Formula
Role
2

silicon oxide layer

Type
Formula
Role
3

phosphorous-doped poly-silicon

Type
Formula
Role
4

3-aminopropyltriethoxysilane

APTES
Type
Formula C9H23NO3Si
Role
5

polydimethylsiloxane

PDMS
Type
Formula
Role

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • oxygen
  • P-type silicon
  1. qJs7x
Product

poly-silicon wire ion sensor

References

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